| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electrostatic-actuator manufacturing method or the like that makes the precise depth (a gap length) of a recess measurable. SOLUTION: The electrostatic-actuator manufacturing method is configured to perform a step for forming an etching mask 51 on a glass substrate 50, a step for forming each opening part to form each electrode recessed part 11 and a dummy-pattern recessed part 14 by etching the etching mask 51, a step for forming each electrode recessed part 11 and the dummy-pattern recessed part 14 at each part corresponding to each opening part by etching, a step for further expanding each opening part to form each electrode recessed part 11 and the dummy-pattern recessed part 14, a step for forming each stepped recessed part at each part corresponding to each expanded opening part by etching, a step for forming each recessed part with a desired number of steps by repeating the recessed-part forming step once or several times, a step for forming a film as fixed electrodes, and a step for measuring a depth of the dummy-pattern recessed part 14 by a contact type level-difference meter. COPYRIGHT: (C)2009,JPO&INPIT
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