| 摘要 |
A facet adapter permits flexible coupling of wafer handler ports to various combinations of process modules. In one embodiment, a facet adapter connects a port of a wafer handler to two process modules. The facet adapter may provide additional facets oriented, for example, at ninety degrees to one another. Facet adapters may be employed to flexibly accommodate various semiconductor fabrication system layouts, and in particular, to increase the number of process modules serviced by a single robotic wafer handler.
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