METHOD AND APPARATUS FOR DETECTING DEFECTS IN OPTICAL COMPONENTS

摘要

A method for detecting defects in an optical component to be tested, such as a lens comprising following steps : providing a structured pattern, recording the reflected or transmitted image (21) of the pattern on the optical component to be tested, phase shifting the pattern and recording again similarly the reflected or transmitted image, calculating the local phase and amplitude images of the optical component to be tested, calculating a model image (212) of a defect free optical component and determining corresponding phase and amplitude images of the defect free model optical component, comparing (26) phase and amplitude images of both optical component to be tested and defect free model optical component, determining suspect zones (27) in the optical component to be tested, applying a metrics (28) to separate dust and noise from other defects. Related device and computer program. Use of said method to apply a selection method to a set of optical components.