| 摘要 |
An integrated SAW(Surface Acoustic Wave) based micro-sensor is provided to measure an RFID(Radio Frequency IDentification) tag signal, temperature, and pressure by including an RFID tag, a temperature sensor, and a pressure sensor, and using received RF energy. An antenna(115) transceives a pulse signal on a lower substrate(110). A first IDT(Inter Digital Transducer)(120) converts the pulse signal received through the antenna into an SAW signal and outputs the SAW signal on the lower substrate. An RFID tag reflector(125) is mounted on the lower substrate and includes reflectors capable of measuring an RFID signal by reflecting the SAW signal. A temperature sensor reflector(130) is mounted on the lower substrate and includes the reflectors capable of measuring temperature by reflecting the SAW signal. A pair of metal rods(145) are connected to the first IDT on the lower substrate. A second IDT(155) converts the pulse signal received from the antenna through the metal rods into the SAW signal and outputs the SAW signal on an upper substrate(150). A pressure sensor reflector(160) is mounted on the upper substrate and includes the reflectors capable of measuring pressure by reflecting the SAW signal. |
