| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic ultrasonic transducer, wherein a pair of electrodes can hold a vibrating membrane with equal force and stable membrane vibration can be obtained. SOLUTION: The electrostatic ultrasonic transducer includes a first electrode having a through hole, a second electrode having a through hole, and the vibrating membrane which is held between a pair of electrodes comprising the first electrode and the second electrode and has a conductive layer, wherein the through hole of the first electrode and the through hole of the second electrode are arranged so as to form a pair and direct current bias voltage is applied to the conductive layer, wherein a plate-like fixed member and the pair of electrodes are fixed integrally by allowing a projecting part of the plate-like fixed member having recessed shape to abut on the vicinity of a central part of either of the pair of electrodes on the surface opposite to the vibrating membrane, and a modulation wave obtained by modulating a carrier wave of an ultrasonic frequency band is applied between the pair of electrodes. COPYRIGHT: (C)2009,JPO&INPIT
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