METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device including a plurality of semiconductor elements of different characteristics on a substrate with higher controllability and reduced cost. SOLUTION: The method of manufacturing a semiconductor device including the plurality of semiconductor elements on the substrate including a heating and controlling layer forming step to form, on the substrate, a heating and controlling layer having a plurality of regions with different amounts of heat radiation and heat conductivity and a heating step to heat the substrate forming the heating and controlling layer. COPYRIGHT: (C)2009,JPO&INPIT