| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source capable of emitting high-brightness focused ion beams by minimizing a beam spot at an outlet of an ion source without instabilizing an amount of ion supply to an ionization chamber and created plasma. SOLUTION: The ion source 1 has a supply section 3 for supplying an ionization material such as a gas to the ionization chamber 2, and a pulling-out electrode 4 for pulling out the supplied ionization material from the ionization chamber 2 by ionizing the supplied ionization material. A tapered capillary 6 made of an insulator is arranged in front of the pulling-out direction of the pulling-out electrode 4 in the ionization chamber 2, and the created ion is pulled out from the ionization chamber 2 by passing through the capillary 6. An amount of ion supply is not unstable so that an amount of supply of the ionization material to the ionization chamber 2 is not minimized, and the highly-bright focused ion beam with the diameter of a capillary outlet can be emitted from the ion source. COPYRIGHT: (C)2009,JPO&INPIT
|
