METHOD FOR MANUFACTURING SILICON MONOXIDE VAPOR DEPOSITION MATERIAL AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a silicon monoxide vapor deposition material having high productivity by uniformly depositing a silicon monoxide solid without unevenness. SOLUTION: The method for manufacturing the silicon monoxide vapor deposition material includes: a step of preparing a mixture composed of silicon dioxide particles and molten metal silicon; a step of generating the vapor of the silicon monoxide by bringing the silicon dioxide particles in the mixture and the molten metal silicon into reaction; and a step of depositing the silicon monoxide solid from the vapor of the silicon monoxide to a deposition plate. The silicon monoxide vapor deposition material is manufactured by a method including a step of (A) measuring a deposition thickness on the deposition plate while continuously depositing the silicon monoxide on the deposition plate provided in an upper part of the mixture, and (B) a step of depositing the silicon monoxide at a deposition rate of 0.1 to 5 kg/m2hr until the deposition thickness on the deposition plate attains 5 mm. COPYRIGHT: (C)2009,JPO&INPIT