发明名称 SUBSTRATES WITH ZnCuSe THIN FILM, AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a substrate with a thin film having a (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film on a substrate, more particularly an organic polymer substrate. SOLUTION: The substrate and the substrate with the thin film characterized by including the (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film (where 0≤x≤0.2) prepared in at least a part on the front face of the substrate are provided. The method for manufacturing the substrate with the thin film comprises heating ZnSe within a vacuum vapor deposition vessel arranged with the substrate, and heating CuSe and/or Cu<SB>2</SB>Se to form the (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film (where 0≤x≤0.2) on the front face of the substrate. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008255444(A) 申请公布日期 2008.10.23
申请号 JP20070100997 申请日期 2007.04.06
申请人 HOYA CORP 发明人 ORITA MASAHIRO;NARISHIMA TAKASHI;YANAGIDA HIROAKI
分类号 C23C14/06;C01B19/04;C23C14/24;H01L21/28;H01L21/285 主分类号 C23C14/06
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