发明名称 |
SUBSTRATES WITH ZnCuSe THIN FILM, AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a substrate with a thin film having a (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film on a substrate, more particularly an organic polymer substrate. SOLUTION: The substrate and the substrate with the thin film characterized by including the (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film (where 0≤x≤0.2) prepared in at least a part on the front face of the substrate are provided. The method for manufacturing the substrate with the thin film comprises heating ZnSe within a vacuum vapor deposition vessel arranged with the substrate, and heating CuSe and/or Cu<SB>2</SB>Se to form the (Zn<SB>1-x</SB>Cu<SB>x</SB>)Se thin film (where 0≤x≤0.2) on the front face of the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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申请公布号 |
JP2008255444(A) |
申请公布日期 |
2008.10.23 |
申请号 |
JP20070100997 |
申请日期 |
2007.04.06 |
申请人 |
HOYA CORP |
发明人 |
ORITA MASAHIRO;NARISHIMA TAKASHI;YANAGIDA HIROAKI |
分类号 |
C23C14/06;C01B19/04;C23C14/24;H01L21/28;H01L21/285 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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