| 摘要 |
A foreign substance inspection apparatus is provided to reduce erroneous detection due to diffraction beams from patterns. A foreign substance inspection apparatus includes an inspection unit(4), and first and second detection units(8,9). The inspection unit inputs inspection beam into an object inspection plane and forms a straight typed radiation area(5) on the object inspection plane. The first and second detection units implemented along the same shaft as the inspection unit detect scattered beams caused by foreign substance on the object inspection plane. The first and second detection units are disposed opposite to each other on a plane including the straight typed radiation area.
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