发明名称 DISTRIBUTION ANALYSIS METHOD AND SYSTEM, ABNORMALITY FACILITY ESTIMATION METHOD AND SYSTEM, PROGRAM FOR CAUSING COMPUTER TO EXECUTE ITS DISTRIBUTION ANALYSIS METHOD OR ITS ABNORMALITY FACILITY ESTIMATION METHOD, AND RECORDING MEDIUM READABLE BY COMPUTER HAVING ITS PROGRAM RECORDED THEREIN
摘要 PROBLEM TO BE SOLVED: To provide a distribution analysis method and system for evaluating whether or not analysis target data having such a characteristic as distributed along a plane are similar to a specific distribution shape pattern, which can always provide a good accurate evaluation even when the analysis target data are varied by various factors. SOLUTION: A distribution shape pattern is divided into a plurality of rectangular sections in the form of a grid for a plane of defined analysis target data, and a density value capable of taking a multiple value in a certain numeral range is defined for each of the rectangular sections so that the density value indicates a relative magnitude relationship to characteristic values of the analysis target data (step S101). Typical data similar to the distribution shape pattern and reflecting a variation caused between a plurality of the analysis target data are created (step S102). A similarity indicative of a degree between the analysis target data and the typical data is found (step S103). Evaluation is carried out according to the found similarity whether or not the analysis target data are similar to the distribution shape pattern. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008258486(A) 申请公布日期 2008.10.23
申请号 JP20070100548 申请日期 2007.04.06
申请人 SHARP CORP 发明人 IMAI KATSUKI
分类号 H01L21/66;G01N21/956;G06T1/00;G06T7/00 主分类号 H01L21/66
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