| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a zeolite containing film in which a zeolite component in the film is increased by a dry gel conversion method, surface physical properties can be controlled, and a film having a high smoothness is obtained. SOLUTION: The manufacturing method of the zeolite containing film contains the steps of: forming a precursor film containing an amorphous silicon oxide portion and a zeolite-like repeat portion from a material having the amorphous silicon oxide portion and a material having the zeolite-like repeat portion; and heating the precursor film under the presence of vapor for growing the zeolite-like repeat portion and applying the dry gel conversion method thereto. In this manufacturing method of the zeolite containing film, the material having the amorphous silicon oxide portion and/or the material having the zeolite-like repeat portion contain a silicon atom bonded to a carbon atom of an organic group containing at least one carbon atom. COPYRIGHT: (C)2009,JPO&INPIT
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