| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic washing device which irradiates the whole washing object with ultrasonic waves, even if the washing object is a large-sized one, and effectively washes out eluted metal ions and particles which exist adjacent to the surface of the washing object. SOLUTION: The ultrasonic washing device is provided with; a water storage tank which stores water; a quartz glass container which is provided with its movement possible in the water storage tank and accommodates washing objects to be washed and to which pure water is fed so that it may overflow; a pure water-feeding device which feeds pure water to the quartz glass container; an ultrasonic oscillator which is arranged, opposite to a moving position of the quartz glass container, on the bottom part of the water storage tank; and a quartz glass container-moving mechanism which moves the quartz glass container. COPYRIGHT: (C)2009,JPO&INPIT
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