ZnO VAPOR DEPOSITION MATERIAL AND ZnO FILM FORMED THEREFROM

摘要

PROBLEM TO BE SOLVED: To provide a ZnO vapor deposition material to be used for forming a film having high electroconductivity close to that of an ITO film at a high speed.

SOLUTION: The ZnO vapor deposition material to be used for forming a transparent electroconductive film is formed of a pellet which contains ZnO as a main component and both elements of Ce and Sc. The content proportion of Ce is higher than that of Sc. The content proportion of Ce is in a range of 0.1 to 14.9 mass%, and the content proportion of Sc is in a range of 0.1 to 10 mass%.

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