发明名称 WORKPIECE CARRYING DEVICE
摘要 PROBLEM TO BE SOLVED: To realize a workpiece carrying device capable of positioning a workpiece without providing an independent alignment device. SOLUTION: A carrying mechanism has an alignment part to change a holding state of the workpiece on this workpiece carrying device to carry the workpiece by holding the workpiece by the carrying mechanism and moving this carrying mechanism along the carrying direction of the workpiece. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008254913(A) 申请公布日期 2008.10.23
申请号 JP20070101690 申请日期 2007.04.09
申请人 YOKOGAWA ELECTRIC CORP 发明人 SEKIJIMA SATOSHI
分类号 B65G49/06;B65G47/91;H01L21/68 主分类号 B65G49/06
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