PROCESS OF MANUFACTURING PHASE-SEPARATED DIELECTRIC STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic device having a phase-separated dielectric structure. SOLUTION: An electronic device includes (a) a semiconductor layer and (b) the phase-separated dielectric structure comprising low- and high-permittivity polymers in any sequence. In this case, the low-permittivity polymer has a concentration higher than that of the high-permittivity polymer in a region of the dielectric structure closest to the semiconductor layer. COPYRIGHT: (C)2009,JPO&INPIT