发明名称 SEMICONDUCTOR WAFER AND METHOD FOR CUTTING THE SAME
摘要 A semiconductor wafer and a method for cutting the same, enabling separation of the semiconductor wafer by natural cleavage planes, are disclosed. The cutting method according to an embodiment of the present invention comprises preparing a substrate including a semiconductor layer with at least one projection, formed on a predetermined area thereof; forming a post on an upper surface of the semiconductor layer at one or both sides of the projection to be placed on a cleaving line for cutting of the semiconductor layer; and cutting the substrate including the semiconductor layer along the cleaving line by performing a scribing process in a direction from the substrate and a breaking process in a direction from the semiconductor layer.
申请公布号 US2008258269(A1) 申请公布日期 2008.10.23
申请号 US20080058543 申请日期 2008.03.28
申请人 LG ELECTRONICS INC. 发明人 UM KI YOUNG
分类号 H01L29/06;H01L21/00 主分类号 H01L29/06
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