| 摘要 |
<p>A driver unit (100u) has a first base (110-1), a first stage (130-1), a first elastic body (120-1) having an elasticity to get the first stage moving in one direction (X-axis direction), a second stage (130-2) lying above the first stage and having mounted thereon an object (12) to be driven, and a second elastic body (120-2) having an elasticity to get the second stage moving in another direction (Y-axis direction). The driver unit (100u) further includes a first actuator (141, 142, 143, 22) causing a first oscillatory force to let the first stage moving in the one direction in a way resonating at a resonance frequency that is determined depending on both the first stage and the first elastic body, and a second actuator (161, 162, 22) causing a second oscillatory force to let the second stage resonating in another direction at a resonance frequency that is determined depending on both the second stage and the second elastic body, while getting the second stage moving out of phase by about 90°, compared in phase with the movement of the first stage.</p> |
