Prüfvorrichtung und Prüfverfahren zum optischen Erkennen eines Defekts auf der Oberfläche eines Wafers,申请号DE200610017833-传众专利搜索

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发明名称	Prüfvorrichtung und Prüfverfahren zum optischen Erkennen eines Defekts auf der Oberfläche eines Wafers
摘要
申请公布号	DE102006017833(B4)	申请公布日期	2008.10.23
申请号	DE200610017833	申请日期	2006.04.13
申请人	TOKYO SEIMITSU CO. LTD.	发明人	ISHIKAWA, AKIO
分类号	G01N21/95;G01B11/00;G01N21/956;G06T7/00	主分类号	G01N21/95
代理机构		代理人
主权项
地址

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