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发明名称
Apparatus for conveying substrate
摘要
申请公布号
KR100864948(B1)
申请公布日期
2008.10.23
申请号
KR20070010771
申请日期
2007.02.01
申请人
发明人
分类号
B65G39/02;G02F1/13
主分类号
B65G39/02
代理机构
代理人
主权项
地址
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