摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for quantitative determination of a surface property, wherein a spatially resolved image of a surface (8) to be analyzed, which contains a large number of measured values, is evaluated. <P>SOLUTION: The method comprises the step of analyzing the measured values in order to determine those surface areas (A) of the image representing a specific physical property which can be characterized by the measured values and the step of determining a result value (I) of this physical property, wherein this result value is a characteristic of the measured values of the physical property of all those surface areas (A) determined by analyzing the measured values, and wherein the result value (I) is output so as to correspond to the size of the determined surface areas (A). <P>COPYRIGHT: (C)2009,JPO&INPIT |