| 摘要 |
PROBLEM TO BE SOLVED: To attain both of a small chip size and high efficiency in a multimode interference (MMI) semiconductor laser. SOLUTION: In the semiconductor laser provided with a waveguide configured by connecting a first single mode waveguide, a multimode interference (MMI) waveguide and a second single mode waveguide in this order, the effective refractive index differenceΔn of the MMI waveguide is made larger than that of both the single mode waveguides. For instance, the mesa stripe etching depth of the single mode waveguides is made different from that of the MMI waveguide (Fig. 1(a)), and/or the refractive indexes of materials brought into contact with both side faces of the mesa strip are made different from each other (Fig. 1(b)). COPYRIGHT: (C)2009,JPO&INPIT
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