| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam processing device which can be miniaturized and the cost of which can be reduced. SOLUTION: This beam processing device includes a beam emitting source which emits a beam to process a work 2, a beam passing member 25 which has an emitting part 25a to emit the beam toward a work 2, and through which the beam going toward the work 2 from the beam emitting source passes, a stationary member 6 movable in a prescribed direction while having a stationary surface 6a to which the work 2 is fixed, and a hollow member 23 which is formed like a hollow to be deformable in three dimensions and in the inside of which the beam passing member 25 is disposed. A hollow member 23 is composed of at least a first hollow part 26 and a second hollow part 27 to be mutually connected. An opening part 37 is formed at one end of the hollow member 23, one end of the hollow member 23 abuts on the stationary face, and the inside of the hollow member 23 is brought into a vacuum state. COPYRIGHT: (C)2009,JPO&INPIT
|
