| 摘要 |
PROBLEM TO BE SOLVED: To reduce precision requested for positioning, a calculation time in a vibration analysis process and a rounding error in confirming calculation by a computer in supporting the design of optical equipment in consideration of the deformation of optical components to be used by using a method for analyzing the optimal mechanical structure of the optical equipment by optical path analysis and mechanical system analysis. SOLUTION: The mechanical system analysis model and optical system analysis mode of target optical equipment and the initial value of a mechanical characteristic parameter to be used for the mechanical system analysis are prepared (S1). The initial value of the mechanical characteristic parameter is substituted into the mechanical system analysis model to calculate the deformation state of the optical component (S2). Space distortion from the original shape to the deformed state is calculated from the deformed state calculation result of the face affecting the optical path (S3). Optical performance when the optical component is deformed is calculated by using the reflected optical system analytic model on which the space distortion is reflected (S4). COPYRIGHT: (C)2009,JPO&INPIT
|
