METHOD FOR DETERMINING THRESHOLD VOLTAGE VARIATION USING A DEVICE ARRAY

摘要

A method of measuring threshold voltage variation using a device array provides accurate threshold voltage distribution values for process verification and improvement. The characterization array imposes a fixed drain-source voltage and a constant channel current at individual devices within the array. Another circuit senses the source voltage of the individual device within the array. The statistical distribution of the threshold voltage is determined directly from the source voltage distribution by offsetting each source voltage by a value determined by completely characterizing one or more devices within the array. The resulting methodology avoids the necessity of otherwise characterizing each device within the array, thus reducing measurement time dramatically.