发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device includes a first wiring layer, a second wiring layer and a third wiring layer. The first wiring layer is formed on a semiconductor substrate. The second and the third wiring layer wiring layers are arranged in a direction intersecting with the first wiring layer on respective sides of the wiring layer. An air bridge wiring intersects the second and third wiring layers sandwiching an air layer above the first wiring layer therewith. The overall shape of the air bridge wiring has an upward convex curvature in an arch shape and the transverse sectional shape of the air bridge wiring is in the form of a downward concave curvature.
申请公布号 US2008258311(A1) 申请公布日期 2008.10.23
申请号 US20080107391 申请日期 2008.04.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ASANO TAKASHI
分类号 H01L23/535;H01L21/4763 主分类号 H01L23/535
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