发明名称 |
Triangulating Design Data and Encoding Design Intent for Microlithographic Printing |
摘要 |
The present disclosure relates to fracturing of polygon data, with one application being microlithography. In particular, it relates to preserving data regarding edges and/or vertices of the original polygons as the polygons are triangulated and even if the results of triangulation are further fractured.
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申请公布号 |
US2008260283(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
US20070736490 |
申请日期 |
2007.04.17 |
申请人 |
MICRONIC LASER SYSTEMS AB |
发明人 |
IVANSEN LARS;OSTERBERG ANDERS |
分类号 |
G06K9/40 |
主分类号 |
G06K9/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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