| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inexpensive, simple and highly accurate minute flowmeter hardly having necessity of maintenance. <P>SOLUTION: At first, a calibration curve for indicating the relationship of a flow rate and temperature increase due to heating is prepared. A fluid is flowed in a flow passage, and heated with a heater provided on the way of the flow passage. The heated fluid moves by being mounted on flow, and temperature is uniformed by heat diffusion. In a diffusion part provided on the way of the flow passage, the influence of acceleration due to heating by the heater is relieved, and sufficient diffusion is performed. The temperature measurement of the heated fluid is performed in a temperature detection part provided in the downstream side of the heater to find the flow rate based on the calibration curve. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
