| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a long-life image display device capable of improving electron emission performance of an electron source formed in a display region that does not have display unevenness. <P>SOLUTION: In forming a tunnel insulating film, a positive electrode and a negative electrode of a power source E are connected to a lower electrode 11 and a platinum electrode 22, respectively. In its anodic oxidation process, a tunnel insulation layer 12 (alumina Al<SB>2</SB>O<SB>3</SB>) is formed on the lower electrode 11. During this reaction, PO<SP>3-</SP>ions dissolved in a chemical conversion solution 23 are captured in the tunnel insulation film 12. The tunnel insulation film 12 comprises a surface layer 12A that is an anion layer developing toward the chemical conversion solution 23 from an original surface of an aluminum film constituting the lower electrode 11, and a lower layer 12B growing toward the original aluminum film. The surface layer 12A is ion-conductive. The PO<SP>3-</SP>ions are taken in the surface layer 12A, and thereafter, is subjected to a reverse bias process by changing over the polarity of the power source E. The reverse-bias processing is only for a short period. By this processing, K<SP>+</SP>ions in an electrolytic solution adhere to a surface of the surface layer 12A. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
