| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration switch easily manufacturable with high accuracy, allowing an on-state holding time of the switch to be easily adjusted, and allowing detection acceleration to be adjusted. SOLUTION: A movable structure having beams 4 and 5 and frames 2 and 3 is formed with thin films having the same thickness. The movable structure is fixed to an anchor at one or more points on a board, and the frame 2 is supported by the anchor and the beam 4. The movable structure is structured such that the movement of the frame 3 displacing in an out-of-plane direction is mechanically displaced by a rotating operation of the frame 2, and the displacing and rotating frame contacts a fixed contact at an acceleration not smaller than a threshold value. COPYRIGHT: (C)2009,JPO&INPIT
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