发明名称 |
LAMP FOR RAPID THERMAL PROCESSING CHAMBER |
摘要 |
A lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least about 1100° C is disclosed. In one embodiment, the lamp assembly comprises a bulb enclosing at least one radiation generating filament attached to a pair of leads, a lamp base configured to receive the pair of leads, a sleeve having a wall thickness of at least about 0.013 inches and a potting compound having a thermal conductivity greater than about 100 W/(K-m). |
申请公布号 |
WO2008101044(A3) |
申请公布日期 |
2008.10.23 |
申请号 |
WO2008US53905 |
申请日期 |
2008.02.14 |
申请人 |
APPLIED MATERIALS, INC.;RANISH, JOSEPH MICHAEL;SORABJI, KHURSHED |
发明人 |
RANISH, JOSEPH MICHAEL;SORABJI, KHURSHED |
分类号 |
F26B19/00;F21Y101/00 |
主分类号 |
F26B19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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