发明名称 |
TRIANGULATING DESIGN DATA AND ENCODING DESIGN INTENT FOR MICROLITHOGRAPHIC PRINTING |
摘要 |
The present disclosure relates to fracturing of polygon data, with one application being microlithography. In particular, it relates to preserving data regarding edges and/or vertices of the original polygons as the polygons are triangulated and even if the results of triangulation are further fractured. |
申请公布号 |
WO2008125692(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
WO2008EP54649 |
申请日期 |
2008.04.17 |
申请人 |
MICRONIC LASER SYSTEMS AB;IVANSEN, LARS;OESTERBERG, ANDERS |
发明人 |
IVANSEN, LARS;OESTERBERG, ANDERS |
分类号 |
G03F7/00;H01J37/00 |
主分类号 |
G03F7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|