摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for laser processing which can form a nozzle hole capable of improving a limit for stably delivering speed of an ink droplet and realizing to improve reaching accuracy of the ink droplet. <P>SOLUTION: In order to manufacturing a nozzle plate 8 by forming a hole 9 to be a nozzle on a substrate, he substrate is irradiated with a laser light under a condition eccentric to an axis of irradiating light while the laser light is rotated around the axis of irradiating light as a central axis. In this instance, the amount of eccentricity of the laser light, for example, the angle of inclination is changed from a larger amount of eccentricity (angle) to a smaller amount of eccentricity. The larger amount of eccentricity is made a first amount of eccentricity and the smaller amount of eccentricity is made a second amount of eccentricity. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |