| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely fix the center electrode in a plasma treatment device to form two discharge spaces with three electrodes. <P>SOLUTION: A first outside electrode 22L is arranged at one side of the center electrode 21, and a second outside electrode 22 R is arranged at the opposite side. The face of the center side of the first outside electrode 22L is covered with a first dielectric member 32L, and the face of the center side of the second outside electrode 22R is covered with a second dielectric member 32R. A plurality of convex parts 32f are formed at the dielectric members 32L, 32R, these convex parts 32f are contacted with the center electrode 21, and the center electrode 21 is clipped. The neighboring convex parts 32f, 32f become the discharge spaces 32e. <P>COPYRIGHT: (C)2009,JPO&INPIT |
