| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and grind an outer peripheral end surface in a well positional accuracy and an inner peripheral end surface of a doughnut shape glass substrate 1. SOLUTION: In the first process, glass plate laminated bodies 5 are put on a jig pallet 20, and two concentric circular incisions having different diameters are formed on the laminated bodies by a double core drill 31. Workpiece seats 25 are inserted into the jig pallet 20 at the positions corresponding to the positions of the concentric circular incisions so as to be pulled out upward. In the second process, doughnut shape glass laminated bodies 6 are pulled out upward from the plate shape glass plate laminated bodies 5 by gripping them together with the workpiece seats 25. In the third process, the outer peripheral end surfaces and the inner peripheral end surfaces of the doughnut shape glass laminated bodies 6 on the pulled out workpiece seats 25 are ground by means of rotary grinding wheels 101, 121. COPYRIGHT: (C)2009,JPO&INPIT
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