| 摘要 |
This invention discloses a stage apparatus which has a stage ( 202 ) and moves the stage ( 202 ) in at least a first direction. The stage apparatus includes a holding unit ( 208 ) fixed on the stage ( 202 ) to extend in the first direction. The holding unit ( 208 ) includes a first portion and a second portion ( 213 ) inserted between the first portion and the stage ( 202 ). The first portion includes a holding surface which holds an object ( 201 ). The length of the second portion ( 213 ) in the first direction is less than that of the first portion.
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