发明名称 |
Scanning Probe Microscope System |
摘要 |
A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.
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申请公布号 |
US2008258059(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
US20060887276 |
申请日期 |
2006.03.16 |
申请人 |
RIKEN |
发明人 |
SAITO AKIRA;AONO MASAKAZU;KUWAHARA YUJI;MARUYAMA JYUNPEI;MANABE KEN |
分类号 |
G21K7/00;G01B21/30;G01N23/223;G01Q10/02;G01Q30/02;G01Q60/10;G01Q70/12 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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