| 摘要 |
<p>A driver unit (100f) includes a base (110), a movable stage (130) having mounted thereon an object (12) to be driven, a elastic body (120) connecting the base and the stage with one another and having an elasticity to get the stage moving in one direction (Y-axis direction), an actuator (161, 162, 22) applying an oscillatory force to the elastic body to get the stage moving in the one direction in a way resonating at a resonance frequency that is determined depending on both the stage and the elastic body.</p> |
