| 摘要 |
<p>A driver unit (100t) is composed of a movable stage (130), a first elastic body (120-1) coupled at any one of lengthwise opposite ends thereof to the stage and having an elasticity to get the stage moving in one direction, a first actuator (181) causing an oscillatory force to let the stage moving in the one direction in a way resonating at a resonance frequency determined dependently on both the stage and the first elastic body, and a second actuator (182) creating a driving force to get the stage moving in another direction in either stepwise or continuous manner. The driver unit (100t) further includes a driving source (180) connected to the other end of the first elastic body, a second elastic body (120-2) coupled at any one of lengthwise opposite ends thereof to the driving source and having an elasticity to get the stage moving in the one direction, a third elastic body (120-3) coupled at one end thereof to another end of the second elastic body and having an elasticity to get the stage moving in another direction, and a base (110) connected with another end of the third elastic body.</p> |
