发明名称 POLISHING PAD
摘要 <p>Provided is a polishing pad which does not generate an end point detection error from the initial stage to the last stage of use due to deterioration of light transmittance. A method for manufacturing a semiconductor device using such polishing pad is also provided. The polishing pad is provided with a polishing layer which includes a polishing region and a light transmitting region. The surface of the light transmitting region on the side of the polishing surface is roughened, and the light transmitting region has a light transmittance of 40-60% for a wavelength of 600nm before use.</p>
申请公布号 WO2008126578(A1) 申请公布日期 2008.10.23
申请号 WO2008JP54444 申请日期 2008.03.12
申请人 TOYO TIRE & RUBBER CO., LTD.;OGAWA, KAZUYUKI;KAZUNO, ATSUSHI;KIMURA, TSUYOSHI;SHIMOMURA, TETSUO 发明人 OGAWA, KAZUYUKI;KAZUNO, ATSUSHI;KIMURA, TSUYOSHI;SHIMOMURA, TETSUO
分类号 B24B37/013;B24B37/20;H01L21/304 主分类号 B24B37/013
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