PELLICLE CONTAINER AND MANUFACTURING METHOD THEREOF

摘要

A pellicle container and a manufacturing method thereof are provided to maintain cleanliness of pellicle containers by removing easily a burr on surface after cutting process. A pellicle container shape is formed using resin sheet material through a vacuum process. By cutting the pellicle container shape, a pellicle container is formed. Then melting is performed on a cut surface of the pellicle container. The pellicle container is a pellicle container main body or a pellicle container cover. The melting is performed by spraying solvent. The melting is performed by spraying hot air generated from a nozzle(22) of a heater(23).