| 摘要 |
A life estimating method for a heater wire, which can estimate the life of the heater wire more appropriately than conventional one, by utilizing data obtained during a period (e.g., a temperature rising period), in which a sign of disconnection of the heater wire is likely to be seen, upon estimating the life in advance before the heater wire used in a heating apparatus is disconnected. This method comprises the steps of: detecting a maximum value of magnitude of electric power supplied to the heater wire during the temperature rising period provided for elevating the temperature up to a heating temperature, by supplying the electric power to the heater wire prior to providing a heating process to a wafer or wafers. The method further comprises obtaining an index indicative of magnitude of amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the indexes respectively indicative of the magnitude of the electric power and the magnitude of amplitude of the electric power exceed threshold values respectively provided thereto.
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