摘要 |
Methods and apparatus for electronic devices such as non-volatile memory devices are described. The momory devices include a multi-layer control dielectric, such as a double or triple layer. The multi-layer control electric includes a combination of high-k dielectric meterials such as aluminium oxide (A1<SUB>2</SUB>O<SUB>3</SUB>), Hafnium oxide (HfO<SUB>2</SUB>), and/or hybrid films of Hafnium aluminium oxide. The multi-layer control dielectric provides enhanced characteristics, including increased charge retention, enhanced memory program/erase window, improved reliability and stability, with feasibility for single or multistate (e.g, two, three or four bit) operation.
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申请人 |
NANOSYS, INC.;CHEN, JIAN;DUAN, XIANGFENG;CRUDEN, KAREN;LIU, CHAO;NALLABOLU, MADHURI, L.;RANGANATHAN, SRIKANTH;LEON, FRANCISCO;PARCE, J., WALLACE |
发明人 |
CHEN, JIAN;DUAN, XIANGFENG;CRUDEN, KAREN;LIU, CHAO;NALLABOLU, MADHURI, L.;RANGANATHAN, SRIKANTH;LEON, FRANCISCO;PARCE, J., WALLACE |