| 摘要 |
<P>PROBLEM TO BE SOLVED: To prolong the service life of a thermometer by preventing the damage of the thermometer in a plasma treatment furnace. <P>SOLUTION: A treatment chamber S2 housing a workpiece 2 is equipped with a dummy 120 of the workpiece 2. Electrodes of the same polarity are respectively connected to the workpiece 2 and the dummy 120, and electrodes of the polarity opposite to the polarity of the electrodes connected to the workpiece 2 are connected to conductors 51 for discharge arranged around the workpiece 2. Also, the thermometer 121 for measuring the temperature of the workpiece 2 and a thermometer coating body 122 for coating the thermometer 121 are disposed. The dummy 120 is electrically insulated from the thermometer 122 and the conductors 51 for discharge by the thermometer coating object 122. <P>COPYRIGHT: (C)2009,JPO&INPIT |
