| 摘要 |
An optical actuator having an improved response time and an improved frequency operational range due to the reduced mass of a substrate coupled to an actuator and method of making the same. The optical actuator may be formed by adhering an uncoated substrate to the actuator using an epoxy. Once cured, any deformities and irregularities in a top surface of the substrate are removed. An optical coating is then applied to the top surface of the substrate. Once finished, the optical actuator may be used in a laser resonating cavity. Further, the optical actuator desirably may have a resonant frequency of about 150 kHz.
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