| 发明名称 |
Air handling and chemical filtration system and method |
| 摘要 |
The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.
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| 申请公布号 |
US2008257159(A1) |
申请公布日期 |
2008.10.23 |
| 申请号 |
US20080069514 |
申请日期 |
2008.02.11 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
GOODWIN WILLIAM M.;KISHKOVICH OLEG P.;GRAYFER ANATOLY |
| 分类号 |
B01D47/14;B01D53/18;F24F3/16 |
主分类号 |
B01D47/14 |
| 代理机构 |
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代理人 |
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