发明名称 |
AMORPHOUS SEMICONDUCTING AND CONDUCTING TRANSPARENT METAL OXIDE THIN FILMS AND PRODUCTION THEREOF |
摘要 |
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.
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申请公布号 |
US2008261070(A1) |
申请公布日期 |
2008.10.23 |
申请号 |
US20070738344 |
申请日期 |
2007.04.20 |
申请人 |
MIDWEST RESEARCH INSTITUTE |
发明人 |
PERKINS JOHN;VAN HEST MARINUS FRANCISCUS ANTONIUS;GINLEY DAVID;TAYLOR MATTHEW;NEUMAN GEORGE A.;LUTEN HENRY A.;FORGETTE JEFFREY A.;ANDERSON JOHN S. |
分类号 |
B32B15/00;C23C16/00 |
主分类号 |
B32B15/00 |
代理机构 |
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主权项 |
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地址 |
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