<p>A method of semiconductor manufacturing is disclosed in which doping is accomplished by the implantation of ion beams formed from ionized molecules, and more particularly to a method in which molecular and cluster dopant ions are implanted into a substrate with and without a co-implant of non-dopant cluster ion, such as a carbon cluster ion, wherein the dopant ion is implanted into the amorphous layer created by the co-implant in order to reduce defects in the crystalline structure, thus reducing the leakage current and improving performance of the semiconductor junctions. Dopant ion compounds of the form A<SUB>n</SUB>H<SUB>x</SUB> <SUP>+</SUP></p>
申请公布号
WO2008128039(A2)
申请公布日期
2008.10.23
申请号
WO2008US60029
申请日期
2008.04.11
申请人
KRULL, WADE, A.;SEMEQUIP, INC.;JACOBSON, DALE, C.;SEKAR, KARUPPANAN;HORSKY, THOMAS, N.
发明人
KRULL, WADE, A.;JACOBSON, DALE, C.;SEKAR, KARUPPANAN;HORSKY, THOMAS, N.