| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect triaxial angular velocity or acceleration, with a simple structure of uniaxial simple harmonic oscillation of at least one simple harmonic oscillation body. <P>SOLUTION: A inertial sensor 1 includes a vibrator 117 supported by an elastic support 115 displaceably in a uniaxial direction in the suspended state relative to a base part, and a displacement detection part for detecting displacement of the vibrator 117. The sensor is characterized as follows: vibration of the vibrator 117 is simple harmonic oscillation in the Z-axis direction; new reference axes of the x-axis, the y-axis and the z-axis are provided by shifting respectively the X-axis, the Y-axis and the Z-axis in an orthogonal coordinate system which are reference axes of a vibration coordinate system of the vibrator 117, and position coordinates of the vibrator 117 on the x-axis, the y-axis and the z-axis are detected at least on two spots in one cycle of the vibrator 117; differential vectors (Δx, Δy, Δz) are calculated based on the position coordinates of the two spots detected on the x-axis, the y-axis and the z-axis; and the angular velocity or the acceleration is detected based on the differential vectors. <P>COPYRIGHT: (C)2009,JPO&INPIT |
