| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical characteristic measuring device and an optical characteristic measuring method capable of reducing an error caused by an attitude error included in a measured value, even when the attitude error is included in the attitude of a measuring sample, by using a light receiving device equipped with a comparatively small number of light receiving elements. <P>SOLUTION: In this optical characteristic measuring device, which is a device for receiving reflected light from the measuring sample SM, and deriving a prescribed optical characteristic based on its light receiving output, when deriving the optical characteristic, a distribution function showing a distribution of a light receiving quantity of the reflected light along a coordinate axis (x-axis) set on the light receiving surface of a light receiving part 21 is determined based on an output from the light receiving part 21, and the determined distribution function is integrated in a prescribed range, and the prescribed optical characteristic of the measuring sample SM is derived based on the integrated value. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
